发明名称 A METHOD OF DETERMINING AN ELECTRICAL PROPERTY OF A TEST SAMPLE
摘要 <p>A method of obtaining an electrical property of a test sample, comprising a non-conductive area and a conductive or semi-conductive test area, byperforming multiple measurements using a multi-point probe. The method comprising the steps of providing a magnetic field having field lines passing perpendicularly through the test area, bringing the probe into a first position on the test area, the conductive tips of the probe being in contact with the test area, determining a position for each tip relative to the boundary between the non-conductive area and the test area, determining distances between each tip, selecting one tip to be a current source positioned between conductive tips being used for determining a voltage in the test sample, performing a first measurement, moving the probe and performing a second measurement, calculating on the basis of the first and second measurement the electrical property of the test area.</p>
申请公布号 KR20100049098(A) 申请公布日期 2010.05.11
申请号 KR20107004788 申请日期 2008.09.03
申请人 CAPRES A/S 发明人 PETERSEN DIRCH HJORTH;HANSEN OLE
分类号 G01R31/26;G01R1/067;H01L21/66 主分类号 G01R31/26
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