发明名称 Method for making carbon nanotube array
摘要 A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate with a film of catalyst provided thereon; (b) disposing the substrate in a reaction chamber; (c) introducing a carrier gas into the reaction chamber and heating the reaction chamber to a predetermined temperature; (d) introducing a carbon source gas and a hydrogen gas into the reaction chamber separately and simultaneously; the hydrogen gas being introduced such that the hydrogen gas has less of a distance to travel in the reaction chamber than does the carbon source gas to reach the substrate; and (e) growing the array of the carbon nanotubes from the substrate.
申请公布号 US7713589(B2) 申请公布日期 2010.05.11
申请号 US20060371993 申请日期 2006.03.08
申请人 TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 JIANG KAI-LI;FAN SHOU-SHAN
分类号 C23C16/00 主分类号 C23C16/00
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