发明名称 |
Method for making carbon nanotube array |
摘要 |
A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate with a film of catalyst provided thereon; (b) disposing the substrate in a reaction chamber; (c) introducing a carrier gas into the reaction chamber and heating the reaction chamber to a predetermined temperature; (d) introducing a carbon source gas and a hydrogen gas into the reaction chamber separately and simultaneously; the hydrogen gas being introduced such that the hydrogen gas has less of a distance to travel in the reaction chamber than does the carbon source gas to reach the substrate; and (e) growing the array of the carbon nanotubes from the substrate.
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申请公布号 |
US7713589(B2) |
申请公布日期 |
2010.05.11 |
申请号 |
US20060371993 |
申请日期 |
2006.03.08 |
申请人 |
TSINGHUA UNIVERSITY;HON HAI PRECISION INDUSTRY CO., LTD. |
发明人 |
JIANG KAI-LI;FAN SHOU-SHAN |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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