| 摘要 |
<p>PURPOSE: A gas scrubber is provided to process a large quantity of processing gases from a plurality of machines by including an inlet pipe which includes a plurality of inlet ports. CONSTITUTION: A burning chamber(200) burns a process gas. A pre-heat chamber(300) supplies pre-heated air for burning the process gas to the burning chamber. The cooled process gas is outlet from a cooling chamber(400). A gas inlet hole(210) is formed on the upper side of the burning chamber. An inlet pipe(240) with a plurality of inlet ports(241) is connected to the gas inlet hole. A heater(230) is installed between the burning chamber and a pipe(220).</p> |
