发明名称 Polishing tool
摘要 A polishing tool comprising a support member, and polishing means fixed to the support member. The polishing means is composed of felt having a density of 0.20 g/cm3 or more and a hardness of 30 or more, and abrasive grains dispersed in the felt. A polishing method and apparatus involving pressing the polishing means against a surface of a workpiece to be polished, while rotating the workpiece and also rotating the polishing tool.
申请公布号 US7713107(B2) 申请公布日期 2010.05.11
申请号 US20020100901 申请日期 2002.03.20
申请人 DISCO CORPORATION 发明人 SEKIYA SINNOSUKE;YAMAMOTO SETSUO
分类号 B24B1/00;B24B7/19;B24B7/22;B24B7/30;B24B19/00;B24D11/00;B24D13/14;B25B23/16;H01L21/306 主分类号 B24B1/00
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