发明名称 CMOS image sensor and method for fabricating the same
摘要 A complementary metal oxide semiconductor (CMOS) image sensor (CIS) and a method for fabricating the same. A method for fabricating a CIS includes implanting first conductive type dopants in a semiconductor substrate to form a photodiode region in a surface of the semiconductor substrate, implanting second conductive type dopants in the photo diode region to form a second conductive type diffusion region, and implanting fluorine ions in the second conductive type diffusion region to form a fluorine diffusion region.
申请公布号 US7713808(B2) 申请公布日期 2010.05.11
申请号 US20070846289 申请日期 2007.08.28
申请人 DONGBU HITEK CO., LTD. 发明人 LEE JOUNG HO
分类号 H01L21/8238;H01L21/00;H01L21/04;H01L21/329;H01L29/04;H01L31/036;H01L31/062 主分类号 H01L21/8238
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