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发明名称
APPARATUS AND METHOD FOR TREATING SUBSTRATE
摘要
申请公布号
KR100957225(B1)
申请公布日期
2010.05.11
申请号
KR20070113132
申请日期
2007.11.07
申请人
发明人
分类号
H01L21/68;H01L21/677;H01L21/687
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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