发明名称 |
Electromechanical system having a dielectric movable membrane and a mirror |
摘要 |
A microelectromechanical (MEMS) device includes at least one electrode, a first reflective layer, and a movable reflective element. The movable reflective element includes a flexible dielectric layer and a second reflective layer mechanically coupled to the flexible dielectric layer. The flexible dielectric layer flexes in response to voltages applied to the at least one electrode to move the reflective element in a direction generally perpendicular to the first reflective layer.
|
申请公布号 |
US7715085(B2) |
申请公布日期 |
2010.05.11 |
申请号 |
US20070746513 |
申请日期 |
2007.05.09 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
SASAGAWA TERUO |
分类号 |
G02B26/00;G02B26/08;G02F1/29 |
主分类号 |
G02B26/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|