SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, PROGRAM, RECORDING MEDIUM AND SUBSTITUTING AGENT

摘要

Provided is a substrate processing method wherein a plurality of kinds of liquids are used. In the method, the liquid left on the substrate after processing by using the liquid is speedily and surely substituted with the liquid to be subsequently used. The method is provided with a step of processing a substrate (W) with the processing liquid, and a step of supplying a substituting liquid on the substrate and substituting the processing liquid left on the substrate with the substituting liquid. The substituting liquid to be used in the substituting step has a surface tension smaller than that of the processing liquid and has the same density as that of the processing liuqid.