发明名称 |
Electrostatic chuck with separated electrodes |
摘要 |
Electrostatic clamping devices and methods for reducing contamination to a workpiece coupled to an electrostatic clamping device are disclosed. According to an embodiment an electrostatic clamping device for coupling a workpiece comprises: an embossment portion on a surface of a body to contact the workpiece; and at least two electrodes within the body; wherein the two electrodes are separated by a separation portion below the embossment portion.
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申请公布号 |
US7715170(B2) |
申请公布日期 |
2010.05.11 |
申请号 |
US20070690950 |
申请日期 |
2007.03.26 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
BLAKE JULIAN G.;STONE DALE K.;STONE LYUDMILA;SUURONEN DAVID |
分类号 |
H01L21/683;H01T23/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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