Electrostatic suction type fluid discharge device, electrostatic suction type fluid discharge method, and plot pattern formation method using the same

摘要

An electrostatic suction type fluid discharge device supplies a drive voltage from a power source between a nozzle and an insulating substrate, so as to supply an electric charge to a discharge material supplied into the nozzle. As a result, the discharge material is discharged from the nozzle hole onto the insulating substrate. The diameter of the hole of the nozzle falls within the range between &phgr;0.01 μm and &phgr;25 μm, the power source outputs, as the drive voltage, a bipolar pulse voltage that alternates between positive and negative and has a frequency of not less than 1 Hz.