SPACE TRANSFORMER, PROBE CARD HAVING SPACE TRANSFORMER, AND METHOD FOR MANUFACTURING SPACE TRANSFORMER

摘要

PURPOSE: A space transformer, a probe card including the space transformer and a method for manufacturing the space transformer and the probe card are provided to reduce a manufacturing cost by forming each layers with a photo-resist pattern. CONSTITUTION: A connection unit(210) is electrically connected to a printed circuit board(100). A pattern substrate(220) includes a through hole(221) which exposes one end of the connection unit. A first layer(230) is located on the upper side of the pattern substrate. The first layer includes the first photo resist pattern with a first opening and a first conductive pattern. The first conductive pattern is connected to the connection unit. A second layer(240) includes a second photo resist pattern and a second conductive pattern. The second photo resist pattern exposes the first conductive pattern. The second conductive pattern is connected to the first conductive pattern. A third layer(250) includes a third photo resist pattern with a second opening and a third conductive pattern. The third conductive pattern is connected to the second conductive pattern.