HYBRID OPTICAL MULTI-AXIS BEAM STEERING APPARATUS

摘要

An optical beam steering apparatus has a substrate that defines one or more aligned cavities. A primary optical path means accommodates passage of a light beam. An upper cavity is provided in a portion of the substrate. The upper cavity is aligned to a predetermined degree of precision and is in direct communication with the primary optical path means. A beam steering means is provided in the upper cavity to controllably direct the beam.