发明名称 INSPECTION SYSTEM USING X-RAY
摘要 PURPOSE: An inspecting device using an X-ray is provided to rapidly and precisely observe the inside an object without dismantling the exterior, and to easily figure out an optimum inspection condition depending on an object. CONSTITUTION: An inspecting device using an X-ray comprises frames(110), a placing plate(120), and an X-ray irradiation part(130). The frames comprises an upper frame(111), a lower frame(112), and a plate(113) arranged between the upper and lower frames. The placing plate is formed in the center of the plate, and has a stage(121). The X-ray irradiation part is formed inside the lower frame, and has an irradiating unit(131) for irradiating x-rays to an object.
申请公布号 KR100956873(B1) 申请公布日期 2010.05.11
申请号 KR20090131644 申请日期 2009.12.28
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 HA, TAE HO;SONG, JUN YEOB;LEE, CHANG WOO;KIM, DONG HOON;LEE, JAE HAK
分类号 G01N23/02;G01B15/00;H01L21/66 主分类号 G01N23/02
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