发明名称 |
INSPECTION SYSTEM USING X-RAY |
摘要 |
PURPOSE: An inspecting device using an X-ray is provided to rapidly and precisely observe the inside an object without dismantling the exterior, and to easily figure out an optimum inspection condition depending on an object. CONSTITUTION: An inspecting device using an X-ray comprises frames(110), a placing plate(120), and an X-ray irradiation part(130). The frames comprises an upper frame(111), a lower frame(112), and a plate(113) arranged between the upper and lower frames. The placing plate is formed in the center of the plate, and has a stage(121). The X-ray irradiation part is formed inside the lower frame, and has an irradiating unit(131) for irradiating x-rays to an object. |
申请公布号 |
KR100956873(B1) |
申请公布日期 |
2010.05.11 |
申请号 |
KR20090131644 |
申请日期 |
2009.12.28 |
申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
HA, TAE HO;SONG, JUN YEOB;LEE, CHANG WOO;KIM, DONG HOON;LEE, JAE HAK |
分类号 |
G01N23/02;G01B15/00;H01L21/66 |
主分类号 |
G01N23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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