APPARATUS FOR TRANSFERRING LARGE SIZE SUBSTRATE FOR USE IN TRANSFER CHAMBER AT VACUUM ATMOSPHERE

摘要

PURPOSE: A substrate transfer device for transferring a large substrate inside a transfer chamber of a vacuum environment is provided to horizontally rotate and linearly move a substrate without an incline by directly installing an arm motor on a robot body inside a transfer chamber. CONSTITUTION: A reaction chamber support tube(110) is vertically fixed to the lower side of a transfer chamber outside the transfer chamber. A rotary shaft(130) includes a cable pipe. The upper side of the rotary shaft is vertically inserted to the body inside a cylinder to be fixedly connected to the lower side of the robot body for connecting the cable pipe to the inside of the robot body. A motor box receives an arm motor by providing the motor receiving space separated from the inner space of the transfer chamber. At least two ball screws are installed in parallel to the rotary shaft to face each other while interposing the rotary shaft.