APPARATUS AND METHOD FOR CHECKING OF TEMPERATURE CONTROLLER

摘要

PURPOSE: An apparatus and a method for detecting malfunction of a temperature controller in a substrate processing apparatus are provided to check the malfunction of the temperature controller by generating an alarm when the temperature exceeds a critical temperature through a temperature sensor. CONSTITUTION: A warmer heats a preset chemical solution or deionized water. A temperature controller(200) includes a temperature sensor(220) which measures the temperature of the chemical solution or deionized water. The temperature controller maintains the temperature of the chemical solution or deionized water inside the warmer to a preset temperature. An overheat temperature detector(300) is connected to the temperature controller and confirms the overheat of the temperature controller by increasing or decreasing a resistance.