发明名称 |
SHAFT APPARATUS FOR CONVEYING SUBSTRATE |
摘要 |
PURPOSE: A conveying shaft apparatus is provided to reduce slip phenomenon when transferring a substrate and effectively transfer the substrate, by improving a conveying roller. CONSTITUTION: A conveying shaft apparatus comprises a conveying shaft(100) and a conveying roller unit(200). The conveying roller unit is inserted into and fixed to the conveying shaft. The conveying roller unit comprises a main conveying roller(210) and a surface-contact part(220). The main conveying roller is located at the end of the conveying shaft. The surface-contact part is attached to the outer rotational surface of the main conveying roller. The surface-contact part surface-contacts with a substrate to transfer the substrate.
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申请公布号 |
KR20100047587(A) |
申请公布日期 |
2010.05.10 |
申请号 |
KR20080106546 |
申请日期 |
2008.10.29 |
申请人 |
SEMES CO., LTD. |
发明人 |
LEE, SU HYOUNG;PARK, HEE JONG;KIM, KEE WOONG;CHEON, SE BEOM |
分类号 |
B65G39/04;B65G39/02 |
主分类号 |
B65G39/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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