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发明名称
INSPECTION SYSTEM AND APPARATUS
摘要
申请公布号
EP1869436(B1)
申请公布日期
2009.10.07
申请号
EP20060737092
申请日期
2006.03.06
申请人
QCEPT TECHNOLOGIES INC.
发明人
HAWTHORNE, JEFFREY, ALAN;STEELE, M., BRANDON
分类号
G01N27/00;G01N33/00
主分类号
G01N27/00
代理机构
代理人
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