LASER PROCESSING DEVICE AND LASER PROCESSING METHOD

摘要

PURPOSE: A laser processing apparatus and a processing method thereof are provided to improve processing yield of a laser processing apparatus by re- irradiating a laser beam on a processed area in which processing is not completed. CONSTITUTION: A laser processing apparatus(100) comprises a laser beam light source(10), an optical system(30), a stage(40), and a controller. The laser beam light source emits laser beam. The optical system processes the shape and the energy band of the laser beam. The laser beam processed by the optical system is irradiated on the stage. A processed object(P) is arranged on the stage. The stage is arranged to move relatively on the laser beam light source. The controller judges the need for re-irradiating the laser beam on the processed area. The controller controls the laser beam light source to re-irradiate the laser beam on the processed area in case of the need of re-irradiation of the laser beam.