| 摘要 |
PURPOSE: A pattern aligning method, a comparing method and a device thereof are provided to calculate the angle variation and the ratio of scales between a comparison source pattern and a comparison target pattern, separately, convert the angle and scales, and then perform the actual measurement template matching. CONSTITUTION: A pattern aligning method comprises the following steps of: calculating the angle, scale, center X coordinates and center Y coordinates of a comparison source pattern and a comparison target pattern; calculating the angle variation between the patterns based on the calculated angle and scale; calculating the ratio of scales between the patterns based on the calculated center X and Y coordinates; and converting the comparison source pattern or comparison target pattern at the calculated angle and in the ratio(S18). |
