| 发明名称 |
Structure formed with template having nanoscale features |
| 摘要 |
A structure is provided that is formed with a template defining a pattern having nanoscale features. The template may be positioned on a substrate and include a resist layer having openings formed therein, where the template is configured to accommodate the controlled assembly of nanoscale objects.
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| 申请公布号 |
US7597814(B2) |
申请公布日期 |
2009.10.06 |
| 申请号 |
US20040807873 |
申请日期 |
2004.03.23 |
| 申请人 |
HEWLETT PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
STASIAK JAMES W.;PETERS KEVIN FRANCIS;KORNILOVICH PAVEL |
| 分类号 |
B81C99/00;C03C25/26;B81B7/00;B82B1/00;C12Q1/68;G03F7/00;H01L21/768 |
主分类号 |
B81C99/00 |
| 代理机构 |
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