发明名称 Wafer dicing method
摘要 A wafer stacked on a mounting layer is safely diced. The mounting layer has holes partially corresponding to chips on the wafer. Thus, chips obtained after dicing the wafer can be safely removed from the mounting tape. An amount of the mounting tape used can be reduced. And a production cost can be lowered as well.
申请公布号 US7598157(B2) 申请公布日期 2009.10.06
申请号 US20070798503 申请日期 2007.05.14
申请人 ATOMIC ENERGY COUNTIL-INSTITUTE OF NUCLEAR ENERGYRESEARCH 发明人 WU CHIH-HUNG;CHENG CHIEH;CHANG KAI-SHENG;CHU KUAN-YU
分类号 H01L21/00 主分类号 H01L21/00
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