发明名称 |
Method of manufacturing thin film magnetic head having lower shield layer embedded in insulating |
摘要 |
The method of manufacturing a thin film magnetic head includes forming a first recessed portion for insulation and a second recessed portion for contact that reach the substrate through the first insulating layer from a side of the first insulating layer of the substrate having the first insulating layer thereon; forming a second insulating layer on the substrate in the first recessed portion; and forming the lower shield layer in the first recessed portion and a contact portion in the second recessed portion.
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申请公布号 |
US7596853(B2) |
申请公布日期 |
2009.10.06 |
申请号 |
US20060617657 |
申请日期 |
2006.12.28 |
申请人 |
TDK CORPORATION |
发明人 |
ICHINOHE KENJI;GOTO YOSUKE |
分类号 |
G11B5/127;H04R31/00 |
主分类号 |
G11B5/127 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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