发明名称 Semiconductor memory component with body region of memory cell having a depression and a graded dopant concentration
摘要 A semiconductor memory component comprises at least one memory cell. The memory cell comprises a semiconductor body comprised of a body region, a drain region and a source region, a gate dielectric, and a gate electrode. The body region comprises a first conductivity type and a depression between the source and drain regions, and the source and drain regions comprise a second conductivity type. The gate electrode is arranged at least partly in the depression and is insulated from the body, source, and drain regions by the gate dielectric. The body region further comprises a first continuous region with a first dopant concentration and a second continuous region with a second dopant concentration greater than the first dopant concentration. The first continuous region adjoins the drain region, the depression and the source region, and the second region is arranged below the first region and adjoins the first region.
申请公布号 US7598543(B2) 申请公布日期 2009.10.06
申请号 US20060438883 申请日期 2006.05.23
申请人 QIMONDA AG 发明人 HOFMANN FRANZ;LUYKEN RICHARD JOHANNES;ROESNER WOLFGANG;SPECHT MICHAEL;STAEDELE MARTIN
分类号 H01L27/108 主分类号 H01L27/108
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