摘要 |
PURPOSE: A method of manufacturing a thin film magnetic head is provided to form the GD(gap depth) and peripheral shape of the recording head unit with high precision while suppressing the increase of the fabrication process. CONSTITUTION: A method of manufacturing a thin film magnetic head(50) is as follows. A resist layer is formed on the lower end magnetic pole in a recording head unit(11), having a cross section where the length of head height direction increases from the lower side to the upper side. A gap depth defining layer(51) is formed on an insulating layer(3) and the resist layer adjacent to the lower end magnetic pole by sputtering. The resist layer is removed through a lift off process so that the gap depth defining layer is left in a specific shape. A gap layer(4) is formed on the lower end magnetic pole and the gap depth defining layer by sputtering. An upper magnetic pole is formed on the gap layer.
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