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发明名称
SELF-ALIGNED PATTERN FORMATION USING DUAL WAVELENGTHS
摘要
申请公布号
EP1478978(B1)
申请公布日期
2009.09.23
申请号
EP20030743156
申请日期
2003.02.21
申请人
ADVANCED MICRO DEVICES, INC.
发明人
OKOROANYANWU, UZODINMA;BOTTELLI, ARMANDO, C.
分类号
G03F7/095;G03F7/075;G03F7/20;H01L21/027
主分类号
G03F7/095
代理机构
代理人
主权项
地址
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