发明名称 |
SELF-CONSTRAINED ANISOTROPIC GERMANIUM NANOSTRUCTURE FROM ELECTROPLATING |
摘要 |
<p>A nanostructure comprising germanium, including wires of less than 1 micron in diameter and walls of less than 1 micron in width, in contact with the substrate and extending outward from the substrate is provided along with a method of preparation.</p> |
申请公布号 |
EP2102900(A1) |
申请公布日期 |
2009.09.23 |
申请号 |
EP20070857746 |
申请日期 |
2007.12.18 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COHEN, GUY;DELIGIANNI, HARIKLIA;HUANG, QIANG;ROMANKIW, LUBOMYR |
分类号 |
H01L21/02;B82Y10/00;C25D3/54;C25D5/02;C25D7/12;H01L21/208 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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