| 摘要 |
PURPOSE: A lamp unit and an optical sensor are provided to restrict change of a measurement value due to convection of atmosphere in which oxygen concentration is changed, and to prevent undesired load on an excimer lamp. CONSTITUTION: A lamp unit(2) includes an excimer lamp(5), an optical sensor(6), and a housing(4). The excimer lamp emits ultraviolet rays. The optical sensor receives the ultraviolet rays. The housing maintains the optical sensor. The optical sensor includes a light detecting member(61), a maintaining body(63) of a cylindrical shape, and a driving body(64). The light detecting member detects visible light. The maintaining body is built in the light detecting member. The driving body is maintained on the maintaining body movably. |
