HYDROXYL-CONTAINING MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS

摘要

PURPOSE: A hydroxyl group-containing monomer is provided to ensure excellent transparency for radiation with wavelength 300 nm or less and acid diffusion control effect. CONSTITUTION: A hydroxyl group-containing monomer is represented by chemical formula 1. In chemical formula 1, R1 represents hydrogen atom, fluorine atom, methyl group or trifluoromethyl group; R2 and R3 represent independently C1-15 linear, branched or cyclic monovalant hydrocarbon group, wherein the R2 and R3 can be bonded with each other and form a aliphatic hydrocarbon ring with a carbon atom.