| 摘要 |
PURPOSE: A stage discharge electronic precipitator for processing a semiconductor dust and a scrubber including the same are provided to reduce a time of manufacturing a semiconductor since the efficiency of processing the dust is improved. CONSTITUTION: A stage discharge electronic precipitator is composed of anode cell(111), a ground cell(113) of a plate shape, a frame part, a dust collection module(210), and a casing. The anode cell and ground cell of the plate shape are separated while facing with each other, and the anode cell and ground cell of the plate shape are repetitively arranged in order. The frame part has a first side frame(215a) and the second side frame(215b), and the first side frames are formed in one side.
|
