发明名称 Semiconductor device with a SiGe layer having uniaxial lattice strain
摘要 A semiconductor device includes a MIS transistor. The device includes a buried insulating film formed in one part of a substrate, the buried insulating film being elongated in a gate-width direction and shortened in a gate-length direction of the MIS transistor. A first semiconductor layer is formed on the buried insulating film and has uniaxial lattice strain. A second semiconductor layer covers both sides of the buried insulating film and both sides of the first semiconductor layer, the sides being opposite in the gate-length direction. A gate electrode is formed on the first semiconductor layer with a gate insulating film being formed between the gate electrode and the first semiconductor layer. A source region and a drain region are formed in the second semiconductor layer.
申请公布号 US7592646(B2) 申请公布日期 2009.09.22
申请号 US20060389534 申请日期 2006.03.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NUMATA TOSHINORI
分类号 H01L29/165 主分类号 H01L29/165
代理机构 代理人
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