发明名称 |
Photoresist compositions comprising resin blends |
摘要 |
New positive photoresist compositions are provided that contain a photoactive component and blend of at least two distinct resins: i) a first resin that comprises carbocyclic aryl units with hetero substitution (particularly hydroxy or thio) and ii) a second cross-linked resin. Preferred photoresists of the invention can be imaged at short wavelengths, such as sub-200 nm, particularly 193 nm.
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申请公布号 |
US7592125(B2) |
申请公布日期 |
2009.09.22 |
申请号 |
US20060334939 |
申请日期 |
2006.01.19 |
申请人 |
ROHM AND HAAS ELECTRIC MATERIALS LLC |
发明人 |
SUZUKI YASUHIRO;XU CHENG-BAI |
分类号 |
G03F7/004;G03F7/30 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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