发明名称 Semiconductor device having well with peak impurity concentrations and method for fabricating the same
摘要 The semiconductor device comprises a well 58 formed in a semiconductor substrate 10 and having a channel region; a gate electrode 34n formed over the channel region with an insulating film 32 interposed therebetween; source/drain regions 60 formed in the well 58 on both sides of the gate electrode 34n, sandwiching the channel region; and a pocket region 40 formed between the source/drain region and the channel region. The well 58 has a first peak of an impurity concentration at a depth deeper than the pocket region 40 and shallower than the bottom of the source/drain regions 60, and a second peak of the impurity concentration at a depth near the bottom of the source/drain regions 60.
申请公布号 US7592241(B2) 申请公布日期 2009.09.22
申请号 US20040017859 申请日期 2004.12.22
申请人 FUJITSU MICROELECTRONICS LIMITED 发明人 TAKAO YOSHIHIRO
分类号 H01L21/457 主分类号 H01L21/457
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