SURFACE TREATMENT METHOD, EQUIPMENT, AND PROCESSED OBJECT

摘要

PROBLEM TO BE SOLVED: To prevent an loading effect without complicating the structure of surface treatment equipment. SOLUTION: A processed object 9 is moved relatively to a treatment head 20 in a shifting direction A with relative velocity v, and a treatment gas is blown off from a spout opening 23a to contact with the processed object 9 to carry out surface treatment. A gas is sucked from a first suction opening 26L located apart from the spout opening 23a on an upstream side of the shifting direction A, and the gas is sucked from a second suction opening 26R apart from the spout opening 23a on a downstream side of the shifting direction A. The distance L1 between the spout opening 23a and the first suction opening and the distance L2 between the spout opening 23a and the second suction opening 26R are made equal with each other, and suction pressure of the first suction opening 26L and the second suction opening 26R is made almost equal mutually. A ratio (v/ϕav) of average flow velocityϕav and relative flow velocity v of the gas at a processing path 25R between the spout opening 23a and the second suction opening 26R satisfies 0.5