| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing device such that the lives of lamps arranged at an outer peripheral side of a susceptor do not become short. SOLUTION: A plurality of lamps 50 form a plurality of circular arrays 51 to 53, which are arranged concentrically around the center axis of the susceptor 40. The second and third circular arrays 52 and 53 which are adjacent to each other on the outer peripheral side of the susceptor 40 are arranged at a narrower interval than the first and second circular arrays 51 and 52 which are adjacent to each other on the center axis side of the susceptor 40. Consequently, the intensity of light per lamp 50 disposed on the outer peripheral side of the susceptor 40 becomes small, and consequently the lamps 50 arranged on the outer peripheral side of the susceptor 40 do not have a shorter life. COPYRIGHT: (C)2009,JPO&INPIT
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