| 摘要 |
PROBLEM TO BE SOLVED: To improve a film-forming rate while efficiently using a gas. SOLUTION: An operation control section 120 controls an operation of a frame driving section 111 so that a pressing frame 104 moves forward toward the inside of a body 101 of the apparatus to bring a peripheral part of a substrate-mounting table 105 into a state of abutting the undersurface of the pressing frame 104. The operation control section 120 also controls an operation of the frame driving section 111 so that the pressing frame 104 retreats from the inside of the body 101 of the apparatus to bring a part of the frame into a state of being accommodated in an accommodation section 113 and the peripheral part of the substrate-mounting table 105 is thereby separated from the pressing frame 104. COPYRIGHT: (C)2009,JPO&INPIT
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