发明名称 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>A solid-state imaging device includes a pixel region which is configured such that a photoelectric conversion unit and a signal scanning circuit unit are included in a semiconductor substrate, and a matrix of unit pixels is disposed, and a driving circuit region which is configured such that a device driving circuit for driving the signal scanning circuit unit is disposed on the semiconductor substrate, wherein the photoelectric conversion unit is provided on a back surface side of the semiconductor substrate, which is opposite to a front surface of the semiconductor substrate where the signal scanning circuit unit is formed, and the unit pixel includes an insulation film which is provided in a manner to surround a boundary part with the unit pixel that neighbors and defines a device isolation region.</p>
申请公布号 WO2009107755(A1) 申请公布日期 2009.09.03
申请号 WO2009JP53614 申请日期 2009.02.20
申请人 KABUSHIKI KAISHA TOSHIBA;YAMASHITA, HIROFUMI 发明人 YAMASHITA, HIROFUMI
分类号 H01L27/146;H01L31/10 主分类号 H01L27/146
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