SENSOR MODULE WITH STRESS ISOLATED TEMPERATURE COMPENSATION AND METHOD OF MANUFACTURE

摘要

A sensor module includes a substrate, means for sensing strain applied to the substrate, means for sensing temperature to compensate for thermal effects on the strain-sensing means, and means for isolating the temperature-sensing means from the strain applied to the substrate and detected by the strain-sensing means. In particular, the strain isolation my be a trench etched around the resistive temperature sensor. Alternatively, the temperature sensor may be placed above the strain-sensing means carried by an intermediate film.