| 摘要 |
<p>Provided is an angular velocity sensor by which particularly the excitation vibration efficiency can be properly improved. A contour which connects support beams (14-21) is formed in a frame shape, and anchor portions (22-25) are provided at four corners of the frame shape to support the respective support beams. A pair of mass portions (10, 11) and a pair of excitation portions (12, 13) are provided, the mass portions (10, 11) are respectively provided on two sides of the frame shape which face each other in a Y-axis direction, and the excitation portions (12, 13) are provided on two sides of the frame shape which face each other in an X-axis direction. When the pair of excitation portions (12, 13) vibrate in opposite phases in the X-axis direction, the pair of mass portions (10, 11) are excited in opposite phases in the Y-axis direction.</p> |
