发明名称 Method of fabricating non-volatile memory device having separate charge trap patterns
摘要 A non-volatile memory device prevents charge spreading. The non-volatile memory device includes an isolation trench in a semiconductor substrate, an isolation layer partially filling the isolation trench between first and second fins defined by the isolation trench, a control gate electrode crossing the first and second fins, a first charge trap pattern between the first fin and the control gate electrode, and a second charge trap pattern between the second fin and the control gate electrode.
申请公布号 US2009221140(A1) 申请公布日期 2009.09.03
申请号 US20090453419 申请日期 2009.05.11
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LIM JU-WAN;JANG HYUN-SEOK;CHUNG BYUNG-HONG;HWANG KI-HYUN;YANG SANG-RYOL
分类号 H01L21/28 主分类号 H01L21/28
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