Device i.e. robot-controlled handling device, for handling plate-shaped substrates in manufacturing plant, has manifold effector comprising end effectors, where substrates are simultaneously received and transported by end effectors

摘要

The device (1) has a manifold effector (4) comprising multiple end effectors (8a-8c). Multiple substrates (2) are simultaneously received and transported by the end effectors, where the substrates are supported at respective end effectors in a horizontal retaining plane or a vertical retaining plane. The end effectors are arranged at a specific distance to each other. The manifold effector comprises an actuating unit i.e. drive, to adjust distance between the end effectors. The actuating unit is integrated in a retainer of the manifold effector.