ORGANIC ELECTROLUMINESCENCE DEVICE MANUFACTURING METHOD, ORGANIC ELECTROLUMINESCENCE DEVICE, ORGANIC ELECTROLUMINESCENCE DISPLAY DEVICE, AND DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an organic electroluminescence device manufacturing method for improving the properties, particularly, light emitting efficiency of an organic electroluminescence device which is constructed using a method for forming a film while irradiating a vapor deposition source with plasma under a reduced-pressure atmosphere, and to provide the organic electroluminescence device, an organic electroluminescence display device, and a deposition device. SOLUTION: The manufacturing method is provided for the organic electroluminescence device which emits light from the upper electrode side. It includes a transparent conductive film layer forming step of irradiating the vapor deposition source with plasma under a reduced-pressure atmosphere including oxygen to form a transparent conductive film layer on a substrate while meeting such first conditions that a distance from a plasma introduction part to an oxygen introduction part is not smaller than a distance from the plasma introduction part to the vapor deposition source and such second conditions that a distance from the substrate to the oxygen introduction part is not smaller than a distance from the substrate to the vapor deposition source. COPYRIGHT: (C)2009,JPO&INPIT