| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical system evaluating device for accurately evaluating the imaging performance of an optical system to be inspected. SOLUTION: This optical system evaluating device 1 includes: a light source 5 for irradiating the optical system 10 to be inspected with illumination light; an MLA 20 arranged so that the illumination light passing through the optical system to be inspected comes into a plurality of micro lenses 21, 22, 23, ... arranged planarly; an image sensor 30 for receiving the illumination light passing and collected through the plurality of micro lenses as a point image in a plurality of light receiving regions 31, 32, 33, ... corresponding to the plurality of micro lenses, respectively; and an image processing section 40 for calculating the imaging performance of the optical system to be inspected based on an image acquired in the plurality of light receiving regions. The image processing section determines a spot diagram by composing images acquired in the plurality of light receiving regions so as to match the optical axis positions of the plurality of micro lenses in the plurality of light receiving regions. COPYRIGHT: (C)2009,JPO&INPIT
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