| 摘要 |
PROBLEM TO BE SOLVED: To provide a floor structure of a clean room capable of reducing damage to a precision machine. SOLUTION: This floor structure of a clean room includes a plurality of divided floor structures 2. One of the divided floor structures adjacent to each other is connected to one end 10 of a damper 3, and the other of the divided floor structures adjacent to each other is separated from the other end 11 of the damper. When an earthquake occurs, the other end 11 of the damper 3 is brought into contact with the other divided floor structure 2. The plurality of divided floor structures 2 are so formed as to have different natural frequencies by differentiating their rigidities and masses from each other. The other end 11 of the damper 3 includes a damper. COPYRIGHT: (C)2009,JPO&INPIT
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