SENSOR ELEMENT USING NANO STRUCTURE, ANALYTICAL CHIP, ANALYTICAL APPARATUS, AND METHOD FOR MANUFACTURING SENSOR ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a sensor chip having a nano structure exposed in a flow channel, which can be formed simply with a high reliability. SOLUTION: A silicon nano wire 3 is exposed, at least a part thereof, in a groove part 5 and is configured as one unit with a substrate 2. Also. a source semiconductor region formed on the substrate forms a part of the one side of the sidewall of the groove part 5 and a drain semiconductor region forms a part of the other side of the sidewall of the groove part 5. COPYRIGHT: (C)2009,JPO&INPIT