| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method and an apparatus for manufacturing a carbon nanotube, in each of which the carbon nanotube oriented vertically can be manufactured easily. SOLUTION: A CVD (chemical vapor deposition) apparatus 10 has an electric furnace 12. A quartz tube 14 is made to pass through the electric furnace 12. A heater 16 and a thermocouple 18 are arranged on the periphery of the quartz tube 14. A gas supply part 22 is connected to one end of the quartz tube 14 and a pressure regulating valve 23 and an exhaust part 24 are connected to the other end of the quartz tube 14. The gas supply part 22, the pressure regulating valve 23 and the exhaust parts 24 are controlled by a control part 20. The quartz tube 14 is evacuated by the exhaust part 24, the inside of the evacuated quartz tube 14 is heated by the heater 16 to the temperature at which a catalyst 26 is sublimed and acetylene gas 30 is made to flow in the heated quartz tube 14 from the gas supply part 22 to react the catalyst 26 with the acetylene gas 30 in the gas phase and orient the carbon nanotube vertically on a quartz substrate 28. COPYRIGHT: (C)2009,JPO&INPIT
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