METHOD FOR MANUFACTURING THIN FILM MULTILAYER DEVICE, METHOD FOR MANUFACTURING DISPLAY DEVICE, AND THIN FILM MULTILAYER DEVICE

摘要

In a method for manufacturing a thin film multilayer device, a plastic substrate is bonded to a supporting substrate with an adhesive from an upper layer film of a weakly adhesive inorganic film and a lower layer film of the weakly adhesive inorganic film, and the plastic substrate is supported on the glass substrate by an adhesive force stronger than that between the upper layer film and the lower layer film. A plurality of thin films are stacked on the plastic substrate which is supported on the glass substrate. The plastic substrate whereupon the thin films are stacked is removed from the glass substrate by separating the upper layer film and the lower layer film one from the other.