| 摘要 |
<p>Provided is an angular velocity sensor by which particularly leakage vibration can be prevented, mass portions can be suitably excited by a simple constitution, and the angular velocity detection accuracy can be properly improved. A contour (C) which connects support beams (14-21) is formed in a frame shape. Mass portions (10, 11) are supported by support beams located on two side of the frame shape which face each other in an X-axis direction, and excitation portions (12, 13) are supported by support beams located on two sides of the frame shape which face each other in a Y-axis direction. Support beams near four corners of the frame shape are suspended by elastically deformable spring portions (90-97). When a pair of excitation portions (12, 13) vibrate in opposite phases in the X-axis direction, a pair of mass portions (10, 11) are excited in opposite phases in the Y-axis direction.</p> |
