| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that prevents machining dust from sticking to a workpiece or the like by removing the machining dust near the workpiece while avoiding interference with a laser beam. <P>SOLUTION: The laser beam machining apparatus 1 is equipped with a machining stage 4 having a machining face 4a for holding a workpiece 2 and is configured to move a laser beam 3 for machining the workpiece 2 in two directions orthogonally crossing along the machining face 4a. The apparatus is also equipped with a pair of sucking means 7, 8 for sucking the machining dust, and is characterized in that the pair of sucking means 7, 8 are arranged with a space apart mutually in one direction of the two directions near the machining face 4a in a manner bringing the sucking means close to the machining face 2a of the workpiece 2, that the laser beam 3 is configured to emit between the pair of sucking means 7, 8, and that at least one of the pair of sucking means 7, 8 is made movable in one direction in synchronization with the movement of the laser beam 3 in one direction. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
