| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS (micro electromechanical system) sensor capable of shortening the time required for manufacture. SOLUTION: An XY-movable electrode 3, an XY-fixed electrode 4 and a Z-movable electrode 5 are provided on a silicon substrate 2. The XY-movable electrode 3 is made to face the XY-fixed electrode 4 and can be displaced in the facing direction. The Z-movable electrode 5 faces the silicon substrate 2 and can be displaced in the facing direction. A circular wall part 6, enclosing the XY-movable electrode 3, the XY-fixed electrode 4 and the Z-movable electrode 5, is provided on the silicon substrate 2. A circular grounding conduction part 9 along the wall part 6 is provided on the wall part 6. An opening part enclosed by the grounding conduction part 9 is blocked by a cap 12 which comprises a resist tape. COPYRIGHT: (C)2009,JPO&INPIT
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