发明名称 |
SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
A semiconductor substrate (1) includes a plurality of semiconductor elements (2) in which functional elements are constructed and which is formed in a grid pattern, wherein continuous linear grooves (3) are formed on longitudinal and lateral separating lines (4) that individually separate the plurality of semiconductor elements (2) with the exception of intersections of the separating lines (4) and portions corresponding to corners of each semiconductor element (2).
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申请公布号 |
US2009218660(A1) |
申请公布日期 |
2009.09.03 |
申请号 |
US20090391671 |
申请日期 |
2009.02.24 |
申请人 |
PANASONIC CORPORATION |
发明人 |
UTSUMI MASAKI;KUMAKAWA TAKAHIRO |
分类号 |
H01L23/544;H01L21/302 |
主分类号 |
H01L23/544 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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